Fundamental Principles of Optical Lithography The Science of Microfabrication

shang94847320 91 0 PDF 2018-12-07 17:12:49

半导体工艺，有关光刻很好的书，也是当前最新的书 ISBN-10: 0470727306 可以在www.amazon.com上找到此书详细信息

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卡了网匿名网友 2018-12-07 17:12:49

不错，值得下载一看。英文版阅读的费一番功夫。

卡了网匿名网友 2018-12-07 17:12:49

这本书非常好，工艺讲的很详细

卡了网匿名网友 2018-12-07 17:12:49

确实不错，找了好长时间了，谢谢