The trigger mechanism and experiment of a three dimensional quartz tuning fork p
石英音叉三维纳米测头触发机理及实验，黄强先，史科迪，微器件等的真三维纳米测量要求微纳米测头具有纳米量级的触发分辨率。不同于现有各种接触式、非接触式测头以及其他测头，本文利用
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