Effect of native defects and laser induced defects on multi shot laser induced d

The roles of laser-induced defects and native defects in multilayer mirrors under multi-shot irradiation condition are investigated. The HfO2/SiO2 dielectric mirrors are deposited by electron beam evaporation (EBE). Laser damage testing is carried out on both the 1-on-1 and S-on-1 regimes using 355-