Study on optical anisotropy properties of SiO2 films with different thermal anne

wr67650 14 0 PDF 2021-04-27 07:04:12

SiO2 films are deposited on Si substrates by an ion beam sputtering technique and continuously annealed in a quartz culture dish in air at various annealing temperature ranging from 20 to 750 oC with a step of 100 oC for a fixed time of 24 h. The effects of thermal treatment on optical anisotropy pr

用户评论
请输入评论内容
评分:
暂无评论