2018byTaylor&FrancisGroup,LLCThisbookaimstocoverabroadspectrumandisdividedintothreesections.ThefirstsectionaddressestypicalopticalMEMSdevicescontainingmicrosizedfeatures.Italsofeaturestheuseofthistechnologyinimaging,communication,andsensingapplications.Thissectionpresentsasetof