超大规模集成电路制造技术，同志们，超好的一本当代用书！Summary:Fullyupdatedwiththelatesttechnologies,thiseditioncoversthefundamentalprinciplesunderlyingfabricationprocessesforsemiconductordevicesalongwithintegratedcircuitsmadefromsiliconandgalliumarsenide.StressesfabricationcriteriaforsuchcircuitsasCMOS,bipolar,MOS,FE