PartoftheAMNbookseries,thisbookcoverstheprinciples,modelingandimplementationaswellasapplicationsofresonantMEMSfromaunifiedviewpoint.ItstartsoutwiththefundamentalequationsandphenomenathatgovernthebehaviorofresonantMEMSandthengivesadetailedoverviewoftheirimplementationincapacitive,pi