ThepublicationofPrinciplesofLithography,ThirdEditionjustfiveyearsafterthepreviouseditionisevidenceofthequicklychangingandexcitingnatureoflithographyasappliedtotheproductionofintegratedcircuitsandothermicro-andnanoscaledevices.Thistextisintendedtoserveasanintroductiontothescienceof