heKXTJ2isatri-axis+/-2g,+/-4gor+/-8gsiliconmicromachinedaccelerometer.ThesenseelementisfabricatedusingKionix’sproprietaryplasmamicromachiningprocesstechnology.Accelerationsensingisbasedontheprincipleofadifferentialcapacitancearisingfromacceleration-inducedmotionofthesenseelement,whic