A320GHzfullyintegratedterahertzimagingsystemisreported.Thesystemiscomposedofaphaselockedhigh-powertransmitterandacoherenthigh-sensitivitysubharmonic-mixingreceiver,whicharefabricatedusinga130nmSiGeBiCMOStechnology(fT/fmax=220/280GHz).Toenhancetheimagings