Multi Array Probe System For Profile Measurement of Resist Surface

dingyuntao 11 0 PDF 2020-08-21 18:08:59

基于多列探针系统的光刻胶表面形貌测量,刘淑杰,张元良,半导体加工制造产业中,对软质薄膜(如光刻胶)表面形貌的测量要求快速且准确。但由于光刻胶的表面既光滑,又容易受力变形,所以

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