Large range displacement measurement using sinusoidal phase modulating laser dio

sinat_61474 24 0 PDF 2021-02-06 01:02:21

A signal processing method of realizing a large-range displacement measurement in a sinusoidal phase-modulating laser diode interferometer is proposed. The method of obtaining the dynamic value of the effective sinusoidal phase-modulating depth is detailed, and the residual amplitude modulation is a

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