We present compact silicon-arrayed waveguide grating routers (AWGRs) with three different channel spacings of 20, 6.4, and 3.2 nm for optical interconnect systems. The AWGR with the 20 nm channel spacing shows a low loss of 2.5 dB and a low crosstalk of ?20 dB and has a footprint of only 0.27 mm×0.1