Low cost method of fabricating large aperture high efficiency Fresnel diffractiv

duzebiao 21 0 PDF 2021-02-08 20:02:49

To reduce the cost and achieve high diffraction efficiency, a modified moiré technique for fabricating a large-aperture multi-level Fresnel membrane optic by a novel design of alignment marks is proposed. The modified moiré fringes vary more sensitively with the actual misalignment. Hence, the align

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