Multi channel DFB laser array fabricated by SAG with optimized epitaxy condition

qq_58920 15 0 PDF 2021-03-31 01:03:16

Selective area growth (SAG) is performed to fabricate monolithically integrated distributed feedback (DFB) laser array by adjusting the width of a SiO2 mask. A strain-compensated-barrier structure is adopted to reduce the accumulated strain and improve the quality of multi-quantum well materials. Va

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Multi channel DFB laser array fabricated by SAG with optimized epitaxy condition

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