RF MEMS振荡器介绍

RF MEMS振荡器介绍Vibrating RF MEMS for Timing and Frequency References Wan-Thai Hsu Discera,Ann Arbor,MI48108,U.S.A.Abstract―This paper presents recent progresses on makingvibrations,and magnetic field.But regardless the resonators andvibrating RF MEMS oscillators for timing and frequencythe excitations mechanism,for oscillator applications,thereference applications.Starting from the performance resonator should be excited to a specific mode with highestrequirements of an oscillator in various systems,the key aspectsof MEMS oscillators,including resonator design,oscillator quality factor,lowest motional imped