Weproposeanddiscussseveralfabricationprocessesforacomplex-shapedmirror,whichisafly-eyemirror,usedinanextremeultravioletlithography(EUVL)illuminationsystem.Themirrorhasacomplexreflectivesurfaceconsistingofmanyconcavemirrorelementsthataresectionsofasphere;thetopofeachelementisarcshape