854二十二

ASML2007出版的光罩操作手册，内容详尽，4x和5X都有涉及，对于刚入门的光刻工艺工程师（lithoPE）应该有所帮助

Lithographersatsemiconductorcompaniesareintegrators.Wecombineoptics, precisionmachines,photochemicals,andphotomasksintoworkingprocesses. Whilechipmake

Tounderstandthistexttherearesomeprerequisites.Abasicfoundationinlithographyscienceisassumed.TheSPIEHandbookonMicrolithography,MicromachiningandMicrofa

The second edition of this volume is written not only as an introduction to the science and technology of microlithography, but also as a reference fo