Diamond-likecarbondepositionusingmicrowaveplasmachemicalvapordeposition,赖秀琼,陈俊芳,Thespatialplasmadensitydistributioninthereactionchamberofthequartztubemicrowaveplasmaapparatusisdiagnosedatp=1.20kpa,Pw=440WbyaLangmuirprobe,obtaining